The critical pulse acceleration or the critical step acceleration for different angles of decline can be got from the research result s . the edge effects of the comb - capacitors having small angle of decline are researched by using the electronics module of the finite element tool ansys 传感器所能承受的对应不同倾斜角度的最大脉冲加速度或最大阶跃加速度可以通过文中建立的分析模型得到,这对梳齿电容式传感器的设计可以提供参考。